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Laser generation of nano-bumps below 2 nm height on silicon for debris-free marking/patterning
Pena A, Wang Z, Whitehead D, Lloyd R, and Li L
Journal of Physics D: Applied Physics. 2010;43(11):32767.
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Journal title:
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Volume:
43
Issue:
11
Start page:
32767
Digital Object Identifier:
10.1088/0022-3727/43/11/115302
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Active
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Record metadata
Manchester eScholar ID:
uk-ac-man-scw:104829
Created by:
Li, Lin
Created:
8th January, 2011, 10:31:56
Last modified:
18th August, 2015, 12:29:00