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Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants
L.Y.Yue, Z.B.Wang, L.Li
Journal Physics D - Applied Physics. 2012;45(13).
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Journal title:
Volume:
45
Issue:
13
Total:
135401
Digital Object Identifier:
10.1088/0022-3727/45/13/135401
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Active
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Record metadata
Manchester eScholar ID:
uk-ac-man-scw:172029
Created by:
Li, Lin
Created:
30th September, 2012, 21:42:40
Last modified by:
Li, Lin
Last modified:
18th August, 2015, 13:08:58