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- DOI: 10.1063/1.2748035
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Near-field laser parallel nanofabrication of arbitrary-shaped patterns
Guo, W; Wang, Zengbo; Li, Lin; Liu, Z
Applied Physics Letters. 2007;90:243101.
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Full-text held externally
- DOI: 10.1063/1.2748035
Abstract
We present a simple and efficient technique for laser writing of arbitrary nanopatterns across a large surface area without using projection masks. It is based on the unique near-field focusing effect of a self-assembled particle array on the surface interacting with an angular incident laser beam. The spot resolution can be down to 80 nm. More than six million nano-lines and c-shaped uniform patterns were fabricated simultaneously over an area of mm2 by a few laser shots.