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Numerical simulation of excimer laser cleaning of film and particle contaminants
A Mhich, C Grafton-Reed, David Whitehead, IS Molchan, Lin Li, Paul Mativenga, S Cheetham, S Dilworth, S Marimuthu, ZB Liu, ZB Wang
Transactions of the ASME, Journal of Heat Transfer. 2013;135(0):121301-121301.
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Published date:
Language:
eng
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Volume:
135
Issue:
0
Start page:
121301
End page:
121301
Total:
0
Pagination:
121301
Related website(s):
- Related website
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Active
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Record metadata
Manchester eScholar ID:
uk-ac-man-scw:ma353
Created:
20th May, 2015, 11:13:10
Last modified:
31st March, 2016, 08:54:34