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Modeling and simulation of laser cleaning of tapered micro-slots with different temporal pulses

L.Y. Yue, Z.B. Wang, L. Li

Optics & Laser Technology. 2013;45:533-539.

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Abstract

Thermal based laser surface cleaning could strongly depend on the temporal pulse shaping of laser. In this study, we have investigated, based on a Finite Element Method (FEM), the effects of different temporal pulses (Excimer laser, 248 nm, 26 ns), including rectangular and Gaussian shapes, in laser cleaning of microtapered slots covered by oil film (1.0 mu m thick). The FEM model was verified with an analytical solution for a flat surface, and then applied to the tapered micro-slots structure. Plasma shielding effect as an important factor was included in current model. The temporal heating profiles with various laser fluences at different locations of micro-slot were obtained. Corresponding cleaning effects on the cross section of oil film were illustrated. Besides, a mesh size control equation was derived, which could ensure the modeling accuracy ( < 3% deviation). This work has laid down a theoretical base for further research work in laser cleaning of tapered micro-slots. (c) 2012 Elsevier Ltd. All rights reserved.

Keyword(s)

Laser cleaning Micro-slot FEM, HIGH-DENSITY PLASMAS THERMAL-MODEL ABLATION SILICON IRRADIATION SURFACES REMOVAL METALS SI

Bibliographic metadata

Type of resource:
Content type:
Publication status:
Published
Publication type:
Publication form:
Published date:
Journal title:
ISSN:
Publisher:
Volume:
45
Start page:
533
End page:
539
Total:
6
Pagination:
533-539
Digital Object Identifier:
10.1016/j.optlastec.2012.05.036
Attached files embargo period:
Immediate release
Attached files release date:
30th January, 2015
Access state:
Active

Record metadata

Manchester eScholar ID:
uk-ac-man-scw:256972
Created by:
Li, Lin
Created:
30th January, 2015, 10:35:05
Last modified by:
Sokolovski, Vera
Last modified:
18th August, 2015, 13:03:36

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