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Large area nanopatterning of silicon surface by chemical assisted laser processing using near-field enhancement by particle-lens arrays
Guo, W; Wang, Zengbo; Li, Lin; Liu, Z; B, Luky; Whitehead, D
In: Proceedings of 3rd Pacific International Conference on Applications of Lasers and Optoelectronics (PICALO08), Laser Institute of America, Beijing, China: Proceedings of 3rd Pacific International Conference on Applications of Lasers and Optoelectronics (PICALO08), Laser Institute of America, Beijing, China; 2008.
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